| http://www.w3.org/ns/prov#value | - On the ohmic contact layers 51, 52, 53 and 54 and the gate insulating film 30 is formed data wiring 60, 61, 62, 65, 66 and 67 with a thickness of 1500 to 3500 ???, which are made of a conductive material such as aluminum or its alloy, chrome or its alloy, molybdenum or its alloy, chrome nitride or molybdenum nitride, etc.
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