PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • In a recessed oxide isolation process, a silicon nitride or silicon nitride-silicon dioxide composite structure, or other mask is used to pattern the surface of the silicon semiconductor substrate and thereby define exposed regions thereon.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com