About: http://webisa.webdatacommons.org/420224225

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	[0293] In the next step, ions of an n-type impurity such as phosphorus are
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com