About: http://webisa.webdatacommons.org/420239547

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this case, the APC valve 243 is appropriately adjusted to maintain a pressure inside the processing chamber 201 within a range of 10 to 30 Pa, e.g. 20 Pa.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com