About: http://webisa.webdatacommons.org/420255299

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Instead, they may have, e.g., a dot pattern. [0330] In the 14th to 18th embodiments, manufacturing processes including a planarizing process are exemplified.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com