About: http://webisa.webdatacommons.org/420290448

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In one implementation, the silicon substrate is a silicon wafer with a substantially defect-free surface upon which the multi-layer EUVL structure is formed.
http://www.w3.org/ns/prov#wasQuotedFrom	faqs.org