About: http://webisa.webdatacommons.org/420681799

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Herein, the ohmic metal layer 55 is preferably made of a material such as titanium (Ti) or titanium nitride (TiN) which serves as a low resistance stabilizing material for lowering a contact resistance.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au