About: http://webisa.webdatacommons.org/42070653

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	After that, a burying of a wire in a groove of the pattern formed by the etching, CMP and other processes are performed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com