About: http://webisa.webdatacommons.org/420835119

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	ectivity less than 1; providing reactive ion etching system using an etching medium comprising a carbon fluoride gas, Cn F2n+2, wherein n is an integer; and etching said second oxide layer with an etchi
http://www.w3.org/ns/prov#wasQuotedFrom	google.com