About: http://webisa.webdatacommons.org/42089937

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A first metal layer 20 is deposited over a first dielectric 22, for example, by sputtering or other conventional method.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com