| http://www.w3.org/ns/prov#value | - According to the seventh method of the present invention, because a metal including at least one element of ruthenium, iridium, platinum, palladium, rhodium and rhenium, or a compound thereof is used to make at least one layer of the capacitor upper electrode, required value of capacitance can be obtained without compromising the insulation characteristic of the capacitor insulation film.
|
