About: http://webisa.webdatacommons.org/420940033

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	According to this approach a layer of elastomer is deposited on a substrate, and a sacrificial material such as a photoresist is then deposited to form what will ultimately become hollow regions such as chambers and cavities.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr