About: http://webisa.webdatacommons.org/421350342

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the present embodiment, an etching-protective film is formed in the step of forming the filter, and other steps are similar to those in the first embodiment.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com