About: http://webisa.webdatacommons.org/421678469

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In other embodiments, such as others described herein, the MEMS device 10 may comprise layers formed in a single wafer or from two wafers.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com