About: http://webisa.webdatacommons.org/421707596

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Another aspect of the present invention is a system configured to process a semiconductor wafer for three-dimensional integrated circuits.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com