About: http://webisa.webdatacommons.org/421711917

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Instead of the atmosphere including oxygen, the first conductive layer may be formed in an atmosphere including an inert element such as nitrogen or argon, so that the first conductive layer may include the inert element.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com