About: http://webisa.webdatacommons.org/421792677

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	And in an insulating film consisting mainly of silicon it may be single-layer or a layered film of two or more types. [0206] Next, a step of activating the impurity element added to the semiconductor layer is carried out.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr