About: http://webisa.webdatacommons.org/421801959

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In some embodiments, the bare substrate may be a new substrate, i.e. a semiconductor substrate that has not undergone previous processing.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com