About: http://webisa.webdatacommons.org/421851677

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In one embodiment, pod cover 8 may be made of a transparent material, such as polycarbonate, to allow sensing of wafers within cassette 6.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com