About: http://webisa.webdatacommons.org/421907988

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In order to detect mask pattern deficiency from the signal waveform obtained in this manner, one of the following two methods may be used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr