About: http://webisa.webdatacommons.org/421940837

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In order to reduce impurities such as oxygen, nitrogen and carbon in the amorphous silicon film 203 containing germanium as much as possible, SiH4 of 99.9999% or higher purity and GeH4 of 99.99% or higher purity are used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com