About: http://webisa.webdatacommons.org/421948383

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An important problem to be overcome herein is to suppress impurities such as oxygen from being introduced into an initial thin film layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com