| http://www.w3.org/ns/prov#value | - Especially, a representative example is a film whose major component is a nitride of silicon or boron, or a film whose major component is a nitride of at least two of silicon, boron, aluminium, zirconium and tin, particularly a film of a zirconium siliconitride, a film of tin siliconitride or the like.
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