About: http://webisa.webdatacommons.org/422132798

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As a result, there was a problem in that when forming the second and subsequent layers on the semiconductor wafer, the semiconductor wafer had to be transported manually so as to avoid the use of the same transport unit.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com