About: http://webisa.webdatacommons.org/422268017

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Substrate 26 is typically a semiconductor wafer, however, the invention contemplates other types of substrates or other workpieces as well.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com