| http://www.w3.org/ns/prov#value | - Further, in this specification, the silicon-nitrogen compound films include the silicon-nitride films, the silicon-oxynitride films, and films having nonstoichiometric compositions (for example, containing inevitable impurities such as hydrogen atoms) as well as the films having stoichiometric compositions. (For example, the silicon nitride having a stoichiometric composition is Si3N4).
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