About: http://webisa.webdatacommons.org/422314955

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Further, in the aforementioned aspect of the present invention, the third step is a step of removing an oxide film by using hydrofluoric acid, and the fourth step is a step of forming an oxide film by irradiating UV light.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au