About: http://webisa.webdatacommons.org/422637394

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The targets constitute cathodes and the chamber wall is an anode common to the target cathodes.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es