About: http://webisa.webdatacommons.org/422702110

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The barrier layer 120 may include a metal nitride such as tungsten nitride or titanium nitride.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com