About: http://webisa.webdatacommons.org/422720411

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This structure forms an epitaxial system on silicon in which epitaxial silicon, almost free of defects such as stacking faults and dislocations, can be grown beyond this EpiSiOx.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au