About: http://webisa.webdatacommons.org/422940568

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thus, the wafer probe card comprises the substrate 100, on top of which is a layer 132 of a conductive material, such as a metal or polysilicon, which functions as a groundplane.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com