About: http://webisa.webdatacommons.org/422964872

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The multilevel interconnects that lie at the heart of this technology possess features with small CD's and high aspect ratios including contacts, vias, lines and other apertures.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com