About: http://webisa.webdatacommons.org/42310146

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Subsequently, a capping layer, such as silicon nitride or silicon carbide, is deposited, typically at a thickness of 250 .ANG. to 550 .ANG..
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com