About: http://webisa.webdatacommons.org/423105997

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then, a source electrode 20 a and a drain electrode 20 b are formed by depositing a conductive material such as aluminum to a thickness of 4000 ??? to 8000 ??? and patterning it.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au