About: http://webisa.webdatacommons.org/423108033

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The insulating film is not limited to the silicon oxide film and another insulating film including silicon may be used in a single-layer structure or a laminated-layer structure.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com