About: http://webisa.webdatacommons.org/423115508

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The plasma treatment step performed, therefore, must be of very short duration, for example 15-20 seconds, in order to induce the acidic surface without removing the photoresist.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es