About: http://webisa.webdatacommons.org/423240693

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The device of claim 16, wherein the thickness of the dielectric layer formed at the regions other than the region where the upper electrode is formed ranges from 0.01 to 0.1 ??m.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com