About: http://webisa.webdatacommons.org/423373770

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The underlying layers include surface layers for all kinds of members in semiconductor devices, and a substrate such as silicon wafer and surface layer thereof are suitably used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr