About: http://webisa.webdatacommons.org/423403140

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then, catalyst elements are introduced selectively into the amorphous silicon film 602 by using evaporation, sputtering, plasma processing, solution coating, or other techniques.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca