About: http://webisa.webdatacommons.org/423440511

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The third level contains two systems including a local dispatching system 22 (Photolithography, Furnace, Etching, . . . working area) and target system 25 (line balance control).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com