About: http://webisa.webdatacommons.org/423636483

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Even if the lower surfaces of the semiconductor substrates in FIGS. 2 and 3 are covered with insulating films such as oxide films, measurement can be performed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk