About: http://webisa.webdatacommons.org/423766485

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	wherein n is an integer of 2, 3 or 4, and NH.sub.3 into a reaction vessel of a chemical vapor deposition apparatus containing a substrate heated to a temperature of from 20.degree.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com