About: http://webisa.webdatacommons.org/423855170

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	y be formed by laminating films each comprising at least one of selected from Ta, W, Ti, Mo, Al, and Cu, or an alloy material or compound material including the element as its main component.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com