About: http://webisa.webdatacommons.org/42403093

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As shown in FIG. 5, catalytic seed layer 51, comprising Cu and a refractory metal alloy, such as Ta, is deposited in openings 42 and 43.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com