About: http://webisa.webdatacommons.org/42419478

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A substrate holder, on which a semiconductor substrate is mounted, is protected by a material difficult to be etched by halogen, such as halide of quartz, silicon nitride, aluminum nitride, titanium nitride or the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es