About: http://webisa.webdatacommons.org/424285342

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Test patterns at all CDs were captured faithfully without dense/isolated line bias and distortion except for the unwanted holes printed on the 5-um CD test structure which also appear in the simulations.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es