About: http://webisa.webdatacommons.org/424434437

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A conventional resist composition is first applied onto a substrate, such as a silicon wafer, by means of, e.g., a spinner, and then subjected to prebake (PAB treatment).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au