About: http://webisa.webdatacommons.org/424522605

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Next, a thin barrier layer is deposited by PVD, (physical vapor deposition) or CVD (chemical vapor deposition) such as Ta, TaN, W or dual layers, such as Ta/TaN, typically 50-700 ??? thick (30, FIG. 1 c).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au