About: http://webisa.webdatacommons.org/424598252

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Referring to FIG. 4, in a next process step, a damage interface 28 is formed within the first semiconductor layer 12 by implanting hydrogen ions, or other like ions, into the first semiconductor layer 12.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com