About: http://webisa.webdatacommons.org/424604187

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Next, a conductive material, such as conductively doped polysilicon or a metal, is formed such that it fills openings 15.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com